Paper
1 January 1987 In-Process Metrology And Control Of Large Optical Grinders
D. S. Anderson, D. Ketelsen, W. Cary Kittrell, Wm Kuhn, R. E. Parks, P. Stahl
Author Affiliations +
Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967108
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
The advent of rapid figure generation at the University of Arizona has prompted the development of rapid metrology techniques. The success and efficiency of the generating process is highly dependent on timely and accurate measurements to update the feedback loop between machine and optician. We will describe the advantages and problems associated with the in-process metrology and control systems used at the Optical Sciences Center.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. S. Anderson, D. Ketelsen, W. Cary Kittrell, Wm Kuhn, R. E. Parks, and P. Stahl "In-Process Metrology And Control Of Large Optical Grinders", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967108
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KEYWORDS
Metrology

Interferometry

Interferometers

In situ metrology

Optical metrology

Process control

Spatial resolution

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