Table Motion Systems

T. Bispink; M. Weck

doi:10.1117/12.941286

11 January 1987 Table Motion Systems

T. Bispink, M. Weck

Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941286
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

Table motion systems of high precision machines combine several properties, such as very good displacement accuracy and repeatability, small straightness errors of slides and realization of constant velocities. According to these demands special elements are applied, for example high precision slide systems, linear drive systems and metrology systems. A survey about the properties of these elements will be given.

Citation Download Citation

T. Bispink and M. Weck "Table Motion Systems", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941286

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