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13 May 2011 Semiconductor nanomembranes: a platform for new science and technology
M. G. Lagally, A. M. Kiefer, D. M. Paskiewicz, F. Cavallo, S. A. Scott, Z. Q. Ma, D. E. Savage
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Proceedings Volume 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III; 803107 (2011) https://doi.org/10.1117/12.884810
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States
Abstract
Semiconductor nanomembranes, extremely thin (<10 to ~1000 nm) single-crystal sheets, promise considerable new science and technology. They are flexible, they are readily transferable to other hosts and conform and bond easily, and they can take on a large range of shapes (tubes, spirals, ribbons, wires) via appropriate strain engineering and patterning. The ready ability to stack membranes allows the integration of the properties of different materials and/or orientations. A brief review of nanomembrane fabrication and manipulation with a view toward different types of applications is provided.
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M. G. Lagally, A. M. Kiefer, D. M. Paskiewicz, F. Cavallo, S. A. Scott, Z. Q. Ma, and D. E. Savage "Semiconductor nanomembranes: a platform for new science and technology", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803107 (13 May 2011); https://doi.org/10.1117/12.884810
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KEYWORDS
Silicon
Epitaxy
Semiconductors
Crystals
Germanium
Thin films
Nanocrystals
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