13 May 2011 MEMS-based uncooled THz detectors for staring imagers
Author Affiliations +
We review our previous work to develop an uncooled THz detector capable of achieving an NEΔT ~0.5K at 30Hz frame rate and describe our approach to develop a staring THz camera based on a 2D array of such detectors. Both predicted and measured results of performance metrics (responsivity, NEP, response time, spectral bandwidth, NEΔT) are presented. The measured performance agrees reasonably well with predictions and is consistent with attaining our NEΔT goal. Thus far, 1x4 detector arrays have been fabricated, and 1x8 focal plane arrays have been developed and tested. We briefly discuss our vision to achieve a128x128 detector array needed for a practical staring THz imager and describe the technology challenges needed to realize it.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Allen Cox, J. Allen Cox, R. Higashi, R. Higashi, F. Nusseibeh, F. Nusseibeh, C. Zins, C. Zins, "MEMS-based uncooled THz detectors for staring imagers", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80310D (13 May 2011); doi: 10.1117/12.884066; https://doi.org/10.1117/12.884066


Compact THz imaging detector
Proceedings of SPIE (May 30 2013)
"Progress In Schottky-Barrier IR Imagers"
Proceedings of SPIE (September 19 1987)
HgCdTe detector technology at Kunming Institute of Physics
Proceedings of SPIE (September 24 1996)
Smart IR FPAs developed in QinetiQ
Proceedings of SPIE (May 13 2007)
Active terahertz imaging with Ne indicator lamp detector arrays
Proceedings of SPIE (September 01 2009)

Back to Top