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13 May 2011 Energy dissipation in micromechanical resonators
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Abstract
Recent years have witnessed breakthrough researches in micro- and nano-mechanical resonators with small dissipation. Nano-precision micromachining has enabled the realization of integrated micromechanical resonators with record high Q and high frequency, creating new research horizons. Not too long ago, there was a perception in the MEMS community that the maximum f.Q product of a microresonator is limited to a frequency-independent constant determined by the material properties of the resonator. In this paper, the contribution of phonon interactions in determining the upper limit of f.Q product in micromechanical resonators will be discussed and shown that after certain frequency, the f.Q product is no longer constant but a linear function of frequency. This makes it possible to reach very high Qs in GHz micro- and nano-mechanical resonators and filters. Contributions of other dissipation mechanisms such as thermoelastic damping and support loss in the quality factor of a microresonator will be discussed as well.
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Farrokh Ayazi, Logan Sorenson, and Roozbeh Tabrizian "Energy dissipation in micromechanical resonators", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 803119 (13 May 2011); doi: 10.1117/12.884731; https://doi.org/10.1117/12.884731
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