Open Access Paper
13 May 2011 Growth of carbon-based nanostructures
W. C. Mitchel, John J. Boeckl, Jeongho Park
Author Affiliations +
Abstract
Carbon nanostructures such as carbon nanotubes (CNTs) and graphene are being applied to a wide variety of sensor applications. Both CNTs and graphene can be grown by chemical vapor deposition (CVD) from hydrocarbons using catalysts. Both materials require metallic catalysts. CNTs require small particles while graphene requires continuous films. Both materials can be grown by the thermal decomposition of SiC. Under the proper conditions either vertically aligned CNT arrays or planar graphene can be grown. Carbon source molecular beam epitaxy (CMBE) is also under development for growth of graphene. Like SiC decomposition, CMBE is catalyst free but it is not restricted to SiC substrates.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. C. Mitchel, John J. Boeckl, and Jeongho Park "Growth of carbon-based nanostructures", Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80311X (13 May 2011); https://doi.org/10.1117/12.884651
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Cited by 2 scholarly publications.
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KEYWORDS
Graphene

Silicon carbide

Carbon

Chemical vapor deposition

Metals

Silicon

Copper

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