4 May 2011 Large scale micro-Fabry-Perot optical filter arrays
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Abstract
Fabry-Perot filter arrays have been fabricated comprised of six million individual filters using standard semiconductor processing techniques. The current 3000x2000 array consists of 5x5 sub-arrays in which each of the nine micron wide Fabry-Perot filters in the sub-array has a different color response. The 5x5 sub-array is replicated to create a 600x400 matrix of 5x5 micro Fabry-Perot filter sub-arrays. This Fabry-Perot matrix has been integrated with a commercially available panchromatic 6 Megapixel CCD focal plane array to create a 25 color hyperspectral camera with 600x400 imaging pixels. Near-UV, visible and NIR filter arrays have been fabricated. The semiconductor processing technique permits filter arrays of general filter size, shape, configuration and distribution to be implemented with ease.
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Ali A. Abtahi, Ali A. Abtahi, Peter B. Griffin, Peter B. Griffin, Ricky J. Morgan, Ricky J. Morgan, Usha Raghuram, Usha Raghuram, Frida S. Vetelino, Frida S. Vetelino, Francisco Tejada, Francisco Tejada, } "Large scale micro-Fabry-Perot optical filter arrays", Proc. SPIE 8054, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications VII, 805406 (4 May 2011); doi: 10.1117/12.883824; https://doi.org/10.1117/12.883824
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