5 May 2011 Mechanical properties of 1 μm-thick metallic freestanding coatings measured by in-plane uniaxial stress
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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806609 (2011); doi: 10.1117/12.886879
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic
Abstract
The mechanical properties of two aluminium thin films manufactured by two different laboratories were investigated using in-plane uniaxial tensile stress. The geometrical parameters, in particular film thickness, were accurately measured and their influences on the mechanical properties were analyzed. The specimens provided by each supplier show significant differences of their mechanical properties. In the same way, annealing was performed on a specific set of specimens and its influence on the mechanical properties is highlighted and discussed.
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Thibaut Fourcade, Cedric Seguineau, Jean Michel Desmarres, Talal Masri, Joël Alexis, Olivier Dalverny, Julien Martegoutte, Xavier Lafontan, "Mechanical properties of 1 μm-thick metallic freestanding coatings measured by in-plane uniaxial stress", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806609 (5 May 2011); doi: 10.1117/12.886879; https://doi.org/10.1117/12.886879
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KEYWORDS
Aluminum

Thin films

Silicon

Neodymium

Semiconducting wafers

Annealing

Etching

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