New method for selectivity enhancement of SiC field effect gas sensors for quantification of NOx

Christian Bur; Peter Reimann; Mike Andersson; Anita Lloyd Spetz; Andreas Schütze

doi:10.1117/12.886431

5 May 2011 New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO_x

Christian Bur, Peter Reimann, Mike Andersson, Anita Lloyd Spetz, Andreas Schütze

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80660I (2011) https://doi.org/10.1117/12.886431
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

A Silicon Carbide based enhancement type field effect transistor with porous films of Iridium and Platinum as gate metallization has been investigated as a total NOx sensor operated in a temperature cycling mode. This operating mode is quite new for gas sensors based on the field effect but promising results have been reported earlier. Based on static investigations we have developed a suitable T-cycle for NO_x detection in a mixture of typical exhaust gases (CO, C₂H₄, and NH₃). Significant features describing the shape of the sensor response have been extracted allowing determination of NO_x concentrations in gas mixtures. Multivariate statistics (e.g. Linear Discriminant Analysis) have been used to evaluate the multidimensional data. With this kind of advanced signal processing the influence of sensor drift and cross sensitivity to ambient gases can effectively be reduced. Thereby, we were able to detect NO_x and furthermore determine different concentrations of NO_x even in mixtures with typical exhaust gases. It can be concluded that the performance of field effect gas sensors for NO_x determination can be enhanced considerably.

Citation Download Citation

Christian Bur, Peter Reimann, Mike Andersson, Anita Lloyd Spetz, and Andreas Schütze "New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO_x", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660I (5 May 2011); https://doi.org/10.1117/12.886431

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