5 May 2011 Design of linear and nonlinear hybrid optical MEMS displacement sensors
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Abstract
Although capacitive and piezoresistive readouts are commonly used for microelectromechanical structures, they suffer from serious drawbacks like limited range of displacement, inherent nonlinearity, insucient sensitivity, and technological complexity. Our complementary readout approach relies on a novel hybrid optomechanical device, where the displacement range is not limited by typical constraints of capacitive or piezoresistive conversion principles. Furthermore, no electrical connections are required on the micromechanical part. Moreover, this principle enables custom linear or nolinear output characteristics at the same technological effort.
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Wilfried Hortschitz, Wilfried Hortschitz, Franz Kohl, Franz Kohl, Harald Steiner, Harald Steiner, Matthias Sachse, Matthias Sachse, Michael Stifter, Michael Stifter, Johannes Schalko, Johannes Schalko, Artur Jachimowicz, Artur Jachimowicz, Franz Keplinger, Franz Keplinger, } "Design of linear and nonlinear hybrid optical MEMS displacement sensors", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80660P (5 May 2011); doi: 10.1117/12.887631; https://doi.org/10.1117/12.887631
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