5 May 2011 A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion
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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806617 (2011); doi: 10.1117/12.886367
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic
Abstract
In this paper a novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion is presented. An exemplary energy scavenging scenarios is introduced. Moreover, the electro-mechanical properties of different piezoelectric thin films (PZT, AlN, ZnO) are introduced and compared to each other. Depending on the specific load scenario optimum piezoelectric cantilever shapes are investigated. A point load at the free-end of a cantilever requires a triangular cantilever shape. Compared to a classical rectangular shape the electrical area energy density is three times larger. A maximum area energy density value of 35 nJ/mm2 is measured for the triangular cantilever shapes. A uniform load as occurring for fluid-actuated energy harvesting calls for a triangular-curved cantilever shape and is also superior to classical geometries.
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Ingo Kuehne, Matthias Schreiter, Julian Seidel, Helmut Seidel, Alexander Frey, "A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806617 (5 May 2011); doi: 10.1117/12.886367; https://doi.org/10.1117/12.886367
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KEYWORDS
Microelectromechanical systems

Thin films

Aluminum nitride

Beam shaping

Energy harvesting

Ferroelectric materials

Zinc oxide

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