Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions

M. J. Oliver; J. Hernando-García; A. Ababneh; H. Seidel; U. Schmid; J. Olivares; E. Iborra; P. Pobedinskas; K. Haenen; J. L. Sánchez-Rojas

doi:10.1117/12.887010

5 May 2011 Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions

M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. Olivares, E. Iborra, P. Pobedinskas, K. Haenen, J. L. Sánchez-Rojas

Author Affiliations +

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661A (2011) https://doi.org/10.1117/12.887010
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

Resonant microcantilevers are widely spread for different applications, such as atomic force microscopy or biosensor devices. The use of piezoelectric films on top of the cantilevers is a very promising technology due to the possibility of implementing an all electrical actuation/detection scheme. Among the different piezoelectric materials, polycrystalline aluminium nitride (AlN) is a very attractive material as, in contrast to typical alternatives such as lead zirconate titanate or zinc oxide, it is fully compatible with standard silicon technology, what facilitates its integration in silicon-based devices. In this study, our objective is to use sputter-deposited polycrystalline AlN as the actuation material for cantilever-based biosensors and to study the performance of high frequency modes for bio-detection in liquid media. Our results demonstrate a limit of mass detection of 0.07 ng for a 300x200 μm² cantilever in liquid media, which represents a value below the mass of a monolayer of IgG on a 300x200 μm² area.

Citation Download Citation

M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. Olivares, E. Iborra, P. Pobedinskas, K. Haenen, and J. L. Sánchez-Rojas "Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661A (5 May 2011); https://doi.org/10.1117/12.887010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available