5 May 2011 Characterization of the first in-plane mode of AlN-actuated microcantilevers
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Abstract
The characterization of the first in-plane mode of AlN-actuated piezoelectric microcantilevers was done using different techniques. The top electrode of the cantilever was designed to allow for an efficient electrical actuation of these in-plane modes. The detection of the electrically induced in-plane movement was performed optically with the help of a stroboscopic microscope and electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the above techniques. Our results show quality factor values as high as 3000 for the first in-plane mode in air.
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V. Ruiz, V. Ruiz, J. Hernando-García, J. Hernando-García, A. Ababneh, A. Ababneh, H. Seidel, H. Seidel, U. Schmid, U. Schmid, J. K. Gimzewski, J. K. Gimzewski, J. L. Sánchez Rojas, J. L. Sánchez Rojas, "Characterization of the first in-plane mode of AlN-actuated microcantilevers", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661G (5 May 2011); doi: 10.1117/12.886981; https://doi.org/10.1117/12.886981
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