Microfabricated self-resonant structure as a passive wireless chemical sensor

Sheng Zhang; Praveenkumar Pasupathy; Dean P. Neikirk

doi:10.1117/12.886895

5 May 2011 Microfabricated self-resonant structure as a passive wireless chemical sensor

Sheng Zhang, Praveenkumar Pasupathy, Dean P. Neikirk

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661L (2011) https://doi.org/10.1117/12.886895
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

This paper describes ongoing work to develop a low cost, passive wireless chemical sensor using a microfabricated inductor with interdigitated capacitors (IDC). A self-resonant-structure (SRS) is designed by incorporating IDC electrodes in the inter-winding space of the inductor. The distributed IDC capacitance is affected by dielectric constant and conductivity of its environment or material under test (MUT). This serves as a capacitive transducer changing the resonant frequency of the SRS. The SRS is interrogated using a non-contact inductively coupled reader coil. The shift in resonance frequency of the SRS is used to detect material properties of the environment/MUT. The dielectric constant (ε) and conductivity (σ) can be used to provide information about the surrounding environment. The ε and the σ are determined by fitting and extraction from circuit models of the IDC. Relationship between sensor layout and coupling factor between sensor and reader is investigated. Optimizations of the coupling factor based on this relationship are discussed. IDC design trade-offs between the sensor's sensitivity and coupling factor are investigated. The sensor's response to variety of liquid MUTs with a wide range of dielectric constant and conductivity is presented.

Citation Download Citation

Sheng Zhang, Praveenkumar Pasupathy, and Dean P. Neikirk "Microfabricated self-resonant structure as a passive wireless chemical sensor", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661L (5 May 2011); https://doi.org/10.1117/12.886895

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available