5 May 2011 Robust pressure sensor for measurements in boundary layers of liquid fluids with medium total pressures
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In this work, the latest results of the design, fabrication and characterization of a new MEMS piezoresistive pressure sensor are presented. It is made of silicon using a boron diffusion process to create piezoresistors. Significant changes in the layout as well as in the micro-fabrication process have been made, e.g. anodic bonding of a Pyrex cover on the backside. These lead to a very precise pressure sensor, which is tailor made for high dynamic measurements in fluids with a total pressure up to 4 bar. This new piezoresistive pressure sensor has been developed in order to meet the special requirements of measurements in fluid mechanics, particularly with regard to the non-intrusive nature of the sensor. The sensor development, starting with the simulation of mechanical stresses within the diaphragm is described. These calculations have lead to an optimized placement of the piezoresistors in order to achieve a maximum sensitivity. The result of this work is a sensor which has well known properties. Important parameters including sensitivity, resonance frequency and maximum load are described precisely. These are necessary to enable new measurements in the boundary layer of fluids. The experiments and the initial results, e.g. its linearity and its dynamic capability are demonstrated in several figures.
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T. Beutel, T. Beutel, N. Ferreira, N. Ferreira, M. Leester-Schädel, M. Leester-Schädel, S. Büttgenbach, S. Büttgenbach, } "Robust pressure sensor for measurements in boundary layers of liquid fluids with medium total pressures", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661U (5 May 2011); doi: 10.1117/12.885610; https://doi.org/10.1117/12.885610

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