Experimental setup for the coating of chlorosilane based self assembling monolayers to reduce stiction in MEMS devices

H. Steiner; M. Sachse; J. Schalko; W. Hortschitz; F. Kohl; A. Jachimowicz

doi:10.1117/12.887630

5 May 2011 Experimental setup for the coating of chlorosilane based self assembling monolayers to reduce stiction in MEMS devices

H. Steiner; M. Sachse; J. Schalko; W. Hortschitz; F. Kohl; A. Jachimowicz

Author Affiliations +

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806624 (2011) https://doi.org/10.1117/12.887630
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

An often reported problem during production and operation of silicon MEMS is stiction. It describes the sticking of movable MEMS parts to surrounding structures. The probability of the occurrence of stiction is linked to the surface energy of the MEMS. Self assembling monolayers can be used to reduce the surface energy and therefore the probability of stiction. These monolayers have to resist high temperatures up to 400°C to be compatible with various micro-production processes, e.g., eutectic bonding. Several groups tried to coat such monolayers with different success and results. One problem is the instability of the coating method due to water contaminations of the coating solution. To circumvent this error source, an experimental setup was designed and built up to minimize the water content of the monolayer solvent and ensures reproducible conditions during the coating process. The required set of liquids is piped through a system of valves and tubes to rinse a trench with a silicon die. To avoid contamination of the liquids with water, the setup is partly placed in a box flushed with nitrogen. With this experimental setup, the surface energy γ_s of the MEMS structures had been reduced from 18.1 mJ/m² to 33.1 μJ/m² and 36.6 μJ/m² for FDTS and DDMS, respectively.

Citation Download Citation

H. Steiner, H. Steiner, M. Sachse, M. Sachse, J. Schalko, J. Schalko, W. Hortschitz, W. Hortschitz, F. Kohl, F. Kohl, A. Jachimowicz, A. Jachimowicz, } "Experimental setup for the coating of chlorosilane based self assembling monolayers to reduce stiction in MEMS devices", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806624 (5 May 2011); doi: 10.1117/12.887630; https://doi.org/10.1117/12.887630

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years