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5 May 2011 Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS composite
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Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80662F (2011)
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic
The aim of this work is to design and fabricate a flow sensor using an artificial hair cell (AHC) inspired by biological hair cells of fish. The sensor consists of a single cilium structure with high aspect ratio and a mechanoreceptor using force sensitive resistor (FSR). The cilium structure is designed for capturing a drag force with direction due to flow field around the sensor and the mechanoreceptor is designed for sensing the drag force with direction from the cilium structure and converting it into an electric signal. The mechanoreceptor has a symmetric four electrodes to sense the drag force and its direction. To fabricate the single cilium structure with high aspect ratio, we have proposed a new design concept using a separated micro mold system (SMS) fabricated by the LIGA process. For a successful replication of the cilium structure, we used the hot embossing process with the help of a double-sided mold system. We used a composite of multiwall carbon nanotube and polydimethylsiloxane (MWCNT-PDMS). The performance of the mechanoreceptors was measured by a computer-controlled nanoindenter. We carried out several experiments with the sensor in the different flow rate and direction using the experimental test apparatus. To calibrate the sensor and calculate the velocity with direction based the signal from the sensor, we analyzed the coupled phenomena between flow field and the cilium structure to calculate the deflection of the cilium structure and the drag force applying to the cilium structure due to the flow field around sensor.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chi Yeon Kim, Hyun Sup Lee, Yo Han Cho, Cheeyoung Joh, Pyung Choi, and Seong Jin Park "Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS composite", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80662F (5 May 2011);

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