9 May 2011 High-sensitivity temperature sensor with calibration against temperature of a real object
Author Affiliations +
Abstract
This work presents a pyrometer for measurement of temperature of a substrate surface during the MBE growth of semiconductor heterostructures. The pyrometer sensor is based on a high-sensitivity low-noise photodiode sensor representing a microassemblage of a Si p-i-n photodiode with an electronic signal processing scheme using time-pulse modulation. The basic advantage of the proposed pyrometer is its high sensitivity, accuracy (not worse than 1.5oC ) and reproducibility within the temperature interval 450-1200 oC for the operation speed 0.001-1 s under the condition of changing transmission of a vacuum chamber observation (pyrometric) window by up to 10 times. High accuracy and reproducibility of results has been achieved due to implementing the calibration principle against characteristic temperature points inherent in an object and received in situ on indirect measurements.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Galina Yu. Sotnikova, Sergey E. Aleksandrov, Gennadiy A. Gavrilov, Vladimir V. Zabrodskiy, Vladislav L. Suchanov, "High-sensitivity temperature sensor with calibration against temperature of a real object", Proc. SPIE 8073, Optical Sensors 2011; and Photonic Crystal Fibers V, 80731D (9 May 2011); doi: 10.1117/12.886351; https://doi.org/10.1117/12.886351
PROCEEDINGS
10 PAGES


SHARE
Back to Top