27 May 2011 Parallel optical coherence tomography (pOCT) for industrial 3D inspection
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Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80820X (2011); doi: 10.1117/12.889390
Event: SPIE Optical Metrology, 2011, Munich, Germany
Abstract
Industry rely a lot on vision for in line or off line quality inspection. Whereas most of these applications use 2D vision, the need for 3D vision is increasing. Optical Coherence Tomography (OCT) is widely used in medical application to obtain 3D images of biological tissues but is still limited to low-speed and high price instruments in industrial applications. We developed a CMOS camera specially designed for parallel OCT (p-OCT). The advantage of this method over other OCT techniques is its high speed and its ability to maintain a high lateral resolution over large measurement depths. Our camera can acquire up to one million 2D images per second. The amplitude and phase of the modulated signal is calculated within every pixel. Up to 10'000 such amplitude and phase results can be returned in a second, for every pixel. We will present our instrument, which includes a rugged and compact interferometer aligned with a robotized assembly technique. This imaging interferometer is scanned during acquisition, allowing to maintain a high lateral resolution (typically 2 micron) over several millimeters. The interferometer is easily interchangeable (snap-in magnets) in order to choose the ideal magnification for the application. This compact and versatile system can be built directly on a robot arm or scanned over large objects.
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Patrick Lambelet, "Parallel optical coherence tomography (pOCT) for industrial 3D inspection", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80820X (27 May 2011); doi: 10.1117/12.889390; https://doi.org/10.1117/12.889390
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KEYWORDS
Optical coherence tomography

Interferometers

Cameras

3D metrology

Inspection

3D vision

CMOS cameras

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