26 May 2011 Aspherical surface measurement using quadri-wave lateral shearing interferometry
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Abstract
Aspherical surfaces are characterized in reflection using a quadri-wave lateral shearing interferometer (QWLSI). This measures the deformation of a reference source due to the reflection on an aspherical shape. Thanks to the wave front sensor high dynamic range, aspherical sags as large as 100 μm are achieved.
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William Boucher, Pascal Delage, Benoit Wattellier, "Aspherical surface measurement using quadri-wave lateral shearing interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821E (26 May 2011); doi: 10.1117/12.895005; https://doi.org/10.1117/12.895005
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