Measuring amplitude and phase of light emerging from microstructures with HRIM

Toralf Scharf; Myun-Sik Kim; Hans Peter Herzig

doi:10.1117/12.895011

26 May 2011 Measuring amplitude and phase of light emerging from microstructures with HRIM

Toralf Scharf, Myun-Sik Kim, Hans Peter Herzig

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821O (2011) https://doi.org/10.1117/12.895011
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Ultra high-resolution measurements of amplitude and phase fields emerging from fine period amplitude gratings are presented and discussed. In the axial direction periodically repeated features are found, whose origins are the Talbot effect within the Fresnel diffraction regime. The phase field recording leads to a very precise measurement of the localization of the Talbot planes and precisions below 100 nm are demonstrated. The concept of immersion interference microscopy is demonstrated. By accessing the back focal plane of the observation system filtering of diffraction orders provides specific Talbot images and allows to intuitively understand the role of diffraction orders for Talbot effect.

Citation Download Citation

Toralf Scharf, Myun-Sik Kim, and Hans Peter Herzig "Measuring amplitude and phase of light emerging from microstructures with HRIM", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821O (26 May 2011); https://doi.org/10.1117/12.895011

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