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3 June 2011 Extended range metrology: an age old problem
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Interferometric metrology is well established for both single point and full field measurements. However, absolute techniques for long range measurements, spanning 100's to 10,000's of fringe orders whilst maintaining sub-fringe resolution have been reported with widely varying levels of performance. In this paper, techniques for long range multi-wavelength interferometry are reviewed with respect to applications of classical interferometry and fringe projection profilometry. Whilst hierarchical geometric series methods provide a potential solution it is shown that significantly greater freedom in wavelength selection is obtained by applying excess fraction principles and a new predictive model for this technique is discussed.
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Catherine E. Towers, David P. Towers, and K. Falaggis "Extended range metrology: an age old problem", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821P (3 June 2011);

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