26 May 2011 Numerical noise reduction via diffraction for surface profiling interferometry
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Abstract
Phase profiles obtained by phase shifting interferometry often include undesirable concentric ripple-noises, like "bull's-eye patterns" which are caused by scattering from defects on surfaces of optical elements in interferometers. We propose a numerical technique for reducing these bull's-eye noises via numerical diffraction. This technique is applicable to phase data obtained from all types of interferometer, since it only needs the phase data itself. We experimentally demonstrate that this technique is effective in elimination of bull's-eye noises from interferometer data. This technique is applicable to the data obtained from digital holography as well.
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Hidemitsu Toba, Hidemitsu Toba, Shigeru Nakayama, Shigeru Nakayama, Hideaki Homma, Hideaki Homma, Takashi Gemma, Takashi Gemma, Kiyoshi Uchikawa, Kiyoshi Uchikawa, } "Numerical noise reduction via diffraction for surface profiling interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821Q (26 May 2011); doi: 10.1117/12.888918; https://doi.org/10.1117/12.888918
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