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27 May 2011 Transmission sphere calibration and its current limits
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Abstract
When testing the optical surface errors with an interferometer, it is always important to determine the residual errors in the interferometer optics. The calibration of reference optic for proper accuracy is very important issue if the precise phase measurement results are to be obtained using interferometer. A simple ball calibration method is discussed and the sufficient number of measurements for the ball averaging calibration is determined. Further we analysis some errors, which limit the performance of the calibration method by using a combination of both ray optics and wave optics approach.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pengqian Yang, Jia Xu, Jianqiang Zhu, and Stefan Hippler "Transmission sphere calibration and its current limits", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822L (27 May 2011); https://doi.org/10.1117/12.889458
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