Scanning white-light interferometry (SWLI) provides the capability of fast and high-precision three-dimensional
measurement of surface topography. Nevertheless, it is well-known that white-light interferometers more than imaging
microscopes suffer from chromatic aberrations caused by the influence of dispersion. Chromatic aberrations lead to
systematic measuring errors in SWLI, especially on micro-structures with curved or tilted surface areas. For example, the
plane glass plates used in a Mirau-interferometer are a potential source of dispersion. If this influence is not completely
corrected for, errors in height measurement occur. In addition, the magnitude of these errors strongly depends on whether
the coherence peak's position or the phase of an interference signal is evaluated. This study is intended to overcome
these difficulties by a dispersion optimized white-light interferometer. The design corresponds to a Mirau-interferometer,
but in order to reduce dispersion phenomena, a reflective Schwarzschild microscope objective is used.
For beam splitting a so-called pellicle is positioned in-between the objective and the measuring object. The dominant
effect, which limits the accuracy of the interferometer is supposed to depend on multiple reflections from the front and
the back side of the pellicle beam splitter. As a consequence, ghost signals were measured in addition to the typical
white-light interference signals. This indicates that multiple reflections influence the results and finally limit the accuracy
of the interferometer.