Operation And Application Of Scanning Optical Microscopy In An SEM (SOMSEM)

F. Battistella; A. J. Mackintosh; P. J. Wright

doi:10.1117/12.941490

3 August 1987 Operation And Application Of Scanning Optical Microscopy In An SEM (SOMSEM)

F. Battistella, A. J. Mackintosh, P. J. Wright

Proceedings Volume 0809, Scanning Imaging Technology; (1987) https://doi.org/10.1117/12.941490
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

An inexpensive device which enables Scanning Optical Microscopy to be undertaken in an SEM is described. This equipment (SOMSEM) is outlined, and its use is demonstrated by the presentation of results obtained by both O.B.I.C. and Reflective imaging modes.

Citation Download Citation

F. Battistella, A. J. Mackintosh, and P. J. Wright "Operation And Application Of Scanning Optical Microscopy In An SEM (SOMSEM)", Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); https://doi.org/10.1117/12.941490

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