7 June 2011 Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography
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Abstract
We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.
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Gunay Yurtsever, Katarzyna Komorowska, Roel Baets, "Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography", Proc. SPIE 8091, Optical Coherence Tomography and Coherence Techniques V, 80910T (7 June 2011); doi: 10.1117/12.889920; https://doi.org/10.1117/12.889920
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