Optical properties of metal coated nanoscrew Si

Hyunjong Jin; Logan Gang Liu

doi:10.1117/12.893657

20 September 2011 Optical properties of metal coated nanoscrew Si

Hyunjong Jin, Logan Gang Liu

Proceedings Volume 8096, Plasmonics: Metallic Nanostructures and Their Optical Properties IX; 809630 (2011) https://doi.org/10.1117/12.893657
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

In this paper, a unique nanoscrew Si structure is presented. The nanoscrew surface is made by anodized aluminum oxide (AAO) mask formation followed by extended deep reactive ionic etching (DRIE). Dense random zig-zag pillar structures that represent screw shapes are formed, with 1 um in height and the bottom base width ranging from 100 nm to 250 nm. The tip of the nanoscrews have radius of curvature even lower than 10 nm. The apparent naked-eye view of the nanoscrew surface, which only consists of nanopatterned N-type single crystalline Si is diffusively green. The optical properties of nanoscrew Si with and without metal deposition is presented as discussion in applications for SERS.

Citation Download Citation

Hyunjong Jin and Logan Gang Liu "Optical properties of metal coated nanoscrew Si", Proc. SPIE 8096, Plasmonics: Metallic Nanostructures and Their Optical Properties IX, 809630 (20 September 2011); https://doi.org/10.1117/12.893657

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