Sub-micron channels fabricated by direct electron beam lithography on SU8 for optofluidic bacterial analysis

A. E. Vasdekis; D. Psaltis

doi:10.1117/12.893332

23 September 2011 Sub-micron channels fabricated by direct electron beam lithography on SU8 for optofluidic bacterial analysis

A. E. Vasdekis, D. Psaltis

Author Affiliations +

Proceedings Volume 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII; 810209 (2011) https://doi.org/10.1117/12.893332
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

Microfluidic structures in poly(dimethylsiloxane) (PDMS) are usually fabricated by optically patterning a resist and subsequently transferring this pattern to PDMS. Such microsystems suffer from reduced resolution, which in turn inhibit the manipulation of sub-micron scale entities such as bacteria, as well as their optical properties (e.g. long period gratings and radiation losses). In this paper we discuss how electron beam lithography (EBL) can be employed in prototyping SU8 moulds and nanostructures for poly(dimethylsiloxane) (PDMS) based microfluidics and optofluidics. In comparison to conventional optical methods, direct patterning of SU8 with an electron beam enabled both sub- and few micron scale structures with reduced complexity and duration. We will also discuss how to synthesize optofluidic circuits with this method and discuss our preliminary results on how such sub-micron scale structures can be employed in the optofluidic analysis of bacteria.

Citation Download Citation

A. E. Vasdekis and D. Psaltis "Sub-micron channels fabricated by direct electron beam lithography on SU8 for optofluidic bacterial analysis", Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 810209 (23 September 2011); https://doi.org/10.1117/12.893332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available