Anisotropic optical property of an asymmetric bideposition Ta2O5 film: fabrication and measurement

Yi-Jun Jen; Chia-Feng Lin; Tai-Hung Yu; Chun-Jung Lai

doi:10.1117/12.894331

26 September 2011 Anisotropic optical property of an asymmetric bideposition Ta₂O₅ film: fabrication and measurement

Yi-Jun Jen, Chia-Feng Lin, Tai-Hung Yu, Chun-Jung Lai

Proceedings Volume 8104, Nanostructured Thin Films IV; 810417 (2011) https://doi.org/10.1117/12.894331
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

To develop diverse anisotropic thin films, asymmetric bideposition technique is introduced to fabricate tilt columnar Ta₂O₅ films with biaxial optical property. The asymmetric bideposition is achieved using two different opposite deposition angles (a₊,a_-) and two different thicknesses of opposite deposited subdeposits. The two sets of Ta₂O₅ columnar thin films associated with deposited subdeposits (d+,d-)=(5.2,2.8) are prepared at the opposite deposition angles (a₊,a_-)=(70,-40), (75,-40), (80,-40) and at the opposite deposition angles (a₊,a_-)=(70,-50), (75,-50), (80,-50). Columnar thin films with various column angle and biaxial properties are measured their planar birefringence and three principal indexes. The larger column angle leads to higher principal indices. It is demonstrated that the asymmetric bideposition can enhance the birefringence of a tilted columnar thin film.ntut.edu.tw

Citation Download Citation

Yi-Jun Jen, Chia-Feng Lin, Tai-Hung Yu, and Chun-Jung Lai "Anisotropic optical property of an asymmetric bideposition Ta₂O₅ film: fabrication and measurement", Proc. SPIE 8104, Nanostructured Thin Films IV, 810417 (26 September 2011); https://doi.org/10.1117/12.894331

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