20 September 2011 Challenges and opportunities in nanomanufacturing
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Abstract
Nanomanufacturing is the fabrication of materials and components with nanoscale features and resolution and their integration into useful engineered systems. Through the precise control of materials and processes at the nanoscale, new features, functional capabilities, and properties, controlled by physics at the nanoscale, may be realized. The challenges for nanomanufacturing are achieving the desired functionality, product quality, process repeatability, production scalability and cost affordability. The ONR Manufacturing Science Program is meeting these challenges though basic research in nano-scale direct digital manufacturing, massively parallel nanoscale processing, and high-throughput (e.g., roll-to-roll) nanofabrication that encourages system-level integration. These concepts along with research examples will be described.
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Khershed P. Cooper, Khershed P. Cooper, Ralph F. Wachter, Ralph F. Wachter, } "Challenges and opportunities in nanomanufacturing", Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 810503 (20 September 2011); doi: 10.1117/12.894415; https://doi.org/10.1117/12.894415
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