Common-path laser encoder system for nanopositioning

Chyan-Chyi Wu; Cheng-Chih Hsu; Ju-Yi Lee; Chun-Yao Cheng

doi:10.1117/12.892792

20 September 2011 Common-path laser encoder system for nanopositioning

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, Chun-Yao Cheng

Proceedings Volume 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V; 81050I (2011) https://doi.org/10.1117/12.892792
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

In this paper a novel common-path laser encoder system for nanopositioning is proposed, that can effectively reduce the environmental disturbance at its lowest level. It has promising potential for nanometer resolution and large range applications. The experimental results of the proposed laser encoder match well with ones of HP5529A for large ranges. The tested results also show that it has the capability of nanometer scale measurement resolution.

Citation Download Citation

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, and Chun-Yao Cheng "Common-path laser encoder system for nanopositioning", Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 81050I (20 September 2011); https://doi.org/10.1117/12.892792

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