16 September 2011 Metal oxide nanowire growth for nanotechnology-enhanced device applications
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Abstract
This paper presents our on-going nano-epitaxial efforts to grow tin oxide (SnO2), zinc oxide (ZnO), and lead zirconate titanate (PZT) for nanotechnology-enhanced devices. The applicable devices involve piezoelectric energy harvesting devices and nanomaterial-enhanced chemical sensors, with the Systems-level vision involving the piezoelectric energy harvesting devices that could self-power chemical sensors for a stand-alone, self-powered device that could harvest its own power from mechanical vibrations. To this end, device concepts are presented herein and preliminary details for ZnO, SnO2, and PZT material synthesis are presented. The growth of nanowires and nanotetrapods are presented for said device applications using vapor-liquid-solid (VLS), solution synthesis, as well as the results from other synthesis processes. Characterization was done by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS).
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M. M. Oye, M. M. Oye, J. Gacusan, J. Gacusan, O. Lenz, O. Lenz, T. Ngo-Duc, T. Ngo-Duc, J. M. Velazquez, J. M. Velazquez, E. Arreola, E. Arreola, H. Jethani, H. Jethani, M. Rohovie, M. Rohovie, B. Gigante, B. Gigante, A. Kar, A. Kar, B. Kim, B. Kim, A. Hannon, A. Hannon, A. Savvinov, A. Savvinov, Y. Lu, Y. Lu, Ji. Li, Ji. Li, M. Meyyappan, M. Meyyappan, } "Metal oxide nanowire growth for nanotechnology-enhanced device applications", Proc. SPIE 8106, Nanoepitaxy: Materials and Devices III, 81060G (16 September 2011); doi: 10.1117/12.899408; https://doi.org/10.1117/12.899408
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