Paper
16 September 2011 Preparation of BaTiO3 thin films by double-pulse-lasers deposition
Abdalla M. Darwish, Simeon Wilson, Hadi Alkahby, Brent Koplitz
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Abstract
Epitaxial BaTiO3 films were deposited by using innovative double-pulse--lasers Deposition (DPLD) technique. The modified DPLD enables the ablation of batio3 thin film to be doped with Fe and Mn in situ during the ablation process. Different substrates were used like MgO, SrTiO3, and Si to decrease the misfit with BaTiO3. The films deposited at different substrate-temperature in the range of 200°C-800°C. The thin film surface morphology was investigated using both Atomic Force Microscope (AFM) and Reflection high Energy Electron Diffraction (RHEED). The substrate temperature and the oxygen gas pressure affected the morphology of the thin film and in turn the optical response of the thin film. The AFM reviled a new harmonic grating structure of the thin film due to the DPLD ablation. The thin film shows an anomalous response to the HeNe laser as a self-modulation and grating formation pattern were observed.
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Abdalla M. Darwish, Simeon Wilson, Hadi Alkahby, and Brent Koplitz "Preparation of BaTiO3 thin films by double-pulse-lasers deposition", Proc. SPIE 8120, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications V, 812009 (16 September 2011); https://doi.org/10.1117/12.893185
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KEYWORDS
Thin films

Ferroelectric materials

Laser ablation

Diffraction gratings

Oxygen

Diffraction

Atomic force microscope

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