7 September 2011 Quality factor of silicon-on-insulator integrated optical ring resonator
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Abstract
Integrated Optical Ring Resonator structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electronic mechanical system) present provide feasibility for highly compact and low cost integrated optical devices. The SOI Integrated Optical Micro Ring Resonator was designed and fabricated in this paper. We designed bending radius of 15μm optical ring resonator. Most important we designed vertical grating coupler for increasing the coupling efficiency between the single mode fiber and waveguide. We get obvious coupling of SOI Integrated Optical Micro Ring Resonator to single mode waveguide in experiments. Without any optimization processing the quality factor(Q) of micro ring resonator is demonstrated as high as 1.5×104 -1.93×104.
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Chenyang Xue, Chenyang Xue, Yujian Jin, Yujian Jin, Xiaogang Tong, Xiaogang Tong, Danfeng Cui, Danfeng Cui, Shubin Yan, Shubin Yan, Wendong Zhang, Wendong Zhang, } "Quality factor of silicon-on-insulator integrated optical ring resonator", Proc. SPIE 8120, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications V, 81201Q (7 September 2011); doi: 10.1117/12.891814; https://doi.org/10.1117/12.891814
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