Singular beams in metrology and nanotechnology

Joseph Shamir

doi:10.1117/12.895130

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20 September 2011 Singular beams in metrology and nanotechnology

Joseph Shamir

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Proceedings Volume 8122, Tribute to Joseph W. Goodman; 81220H (2011) https://doi.org/10.1117/12.895130
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Optical singularities are localized regions in a light field where one or more of the field parameters, such as phase or polarization, become singular with associated zero intensity. Focused to a small spot, the electromagnetic field around the singularity has interesting characteristics, in particular when it interacts with matter. The light scattered by a material object within the strongly varying optical field around the singularity is extremely sensitive to changes and can be exploited for metrology with high sensitivity and the study of physical processes on a nanometer scale.

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Joseph Shamir "Singular beams in metrology and nanotechnology", Proc. SPIE 8122, Tribute to Joseph W. Goodman, 81220H (20 September 2011); https://doi.org/10.1117/12.895130

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