Intense blue-white luminescence from amorphous silicon oxycarbide (a-SiCxOy) thin films

Vasileios Nikas; Spyros Gallis; Himani Suhag; Mengbing Huang; Alain E. Kaloyeros

doi:10.1117/12.891342

23 September 2011 Intense blue-white luminescence from amorphous silicon oxycarbide (a-SiC_xO_y) thin films

Vasileios Nikas, Spyros Gallis, Himani Suhag, Mengbing Huang, Alain E. Kaloyeros

Proceedings Volume 8123, Eleventh International Conference on Solid State Lighting; 812316 (2011) https://doi.org/10.1117/12.891342
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

We report on blue-white luminescence from amorphous silicon oxycarbide a-SiC_xO_y≤1.68 (0.25<x<0.36) thin films, synthesized by thermal chemical vapor deposition (TCVD) process. The luminescence from SiC_xO_y was found to exhibit a broad band in the blue-violet to near infrared range (370 - 750 nm), visible to the naked eye in a bright room. The effects of carbon concentration (8.4 at.% < C < 13.6 at.%) in the material and post-deposition annealing treatments (Ar and forming gas 5% of H₂ ambient up to 1100°C) on the observed luminescence were studied. The emission intensity slightly decreased with increasing carbon content but was appreciably enhanced in the samples following post-deposition annealing treatment in forming gas 5% of H₂ ambient.

Citation Download Citation

Vasileios Nikas, Spyros Gallis, Himani Suhag, Mengbing Huang, and Alain E. Kaloyeros "Intense blue-white luminescence from amorphous silicon oxycarbide (a-SiC_xO_y) thin films", Proc. SPIE 8123, Eleventh International Conference on Solid State Lighting, 812316 (23 September 2011); https://doi.org/10.1117/12.891342

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