MicroFinish Topographer: surface finish metrology for large and small optics

Robert E. Parks

doi:10.1117/12.892283

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26 September 2011 MicroFinish Topographer: surface finish metrology for large and small optics

Robert E. Parks

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Proceedings Volume 8126, Optical Manufacturing and Testing IX; 81260D (2011) https://doi.org/10.1117/12.892283
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

The MicroFinish Topographer (MFT) is the result of an interest in directly measuring the surface roughness of large optics without the need for using replicas that may degrade the measurement data and that contaminate the surface. Once the MFT proved itself on large optics it was immediately suggested that a similar device should be designed for small optics. All this really took was turning the original MFT upside down and placing small specimens on a holder. This one device tests samples from 10 mm diameter to 10 m with phase measuring interferometry that does not need vibration isolation. Further, the MFT form factor makes it ideal for use in doing on-machine surface finish metrology.

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Robert E. Parks "MicroFinish Topographer: surface finish metrology for large and small optics", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260D (26 September 2011); https://doi.org/10.1117/12.892283

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