27 September 2011 Fluid jet and bonnet polishing of optical moulds for application from visible to x-ray
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Abstract
Electroless Nickel (ENi) and binderless Tungsten Carbide (WC) are materials widely used in industry to make replication moulds for precision optics, with applications ranging from consumer camera lenses to high accuracy X-ray mirrors. The aspheric shape generation is generally performed by diamond turning in the case of Nickel, and micro-grinding in the case of Tungsten Carbide. However, both machining methods fall short from meeting the ultra-precision criteria required by an increasing number of applications, because of insufficient form accuracy and the frequency content of the machining marks they leave on the surface. It is thus commonly observed in industry that moulds need to be subsequently polished by hand, a usually slow and human resource intensive operation. The Zeeko 7-axis CNC machine, equipped with sub-aperture fluid jet and precessed bonnet polishing technology, has been used to develop deterministic finishing processes on both Electroless Nickel and Tungsten Carbide. Corrective polishing to less than λ/20 (<31nm PV) form error can be achieved, as well as the ability to smooth surface texture down to 1nm Ra or less, in a time efficient manner.
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Anthony T. H. Beaucamp, Anthony T. H. Beaucamp, Richard R. Freeman, Richard R. Freeman, Akihiro Matsumoto, Akihiro Matsumoto, Yoshiharu Namba, Yoshiharu Namba, } "Fluid jet and bonnet polishing of optical moulds for application from visible to x-ray", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260U (27 September 2011); doi: 10.1117/12.905491; https://doi.org/10.1117/12.905491
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