27 September 2011 Swing arm optical CMM: self calibration with dual probe shear test
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Proceedings Volume 8126, Optical Manufacturing and Testing IX; 81260W (2011); doi: 10.1117/12.894203
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peng Su, Yuhao Wang, Chang Jin Oh, Robert E. Parks, James H. Burge, "Swing arm optical CMM: self calibration with dual probe shear test", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260W (27 September 2011); doi: 10.1117/12.894203; https://doi.org/10.1117/12.894203


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