27 September 2011 Swing arm optical CMM: self calibration with dual probe shear test
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Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.
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Peng Su, Peng Su, Yuhao Wang, Yuhao Wang, Chang Jin Oh, Chang Jin Oh, Robert E. Parks, Robert E. Parks, James H. Burge, James H. Burge, } "Swing arm optical CMM: self calibration with dual probe shear test", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260W (27 September 2011); doi: 10.1117/12.894203; https://doi.org/10.1117/12.894203


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