In this study, we proposed an air-driving fluid jet polishing (FJP) system which draws slurry utilizing an air/water mixer.
The air-driving FJP system is mainly comprised by an air/water mixer, slurry tank with stirrer, compressed air, pressure
and flow rate regulators, and a nozzle. The high speed air flow in the air/water mixer draws out the slurry from the slurry
tank, and the slurry is guided to mix with air flow inside the nozzle cavity. Then, the combined fluid slurry is emitted
from the nozzle. The air-driving FJP system was preliminarily tested on N-BK7 and ZERODUR® plates with different
air pressure and processing time. The test results show that the air-driving system could get a Gaussian-like removal
shape with 3 kg/cm2 compressed air source and the depth of removal is about 100 nm within 5 seconds processing time.
The compressed air improves the kinetic energy of each abrasive, and makes it more efficient in material removal.
Furthermore, the Gaussian-like removal shape is more convenient for tool path planning and surface waviness control of