Study of air-driving fluid jet polishing

Zong-Ru Yu; Ching-Hsiang Kuo; Chun-Cheng Chen; Wei-Yao Hsu; Din Ping Tsai

doi:10.1117/12.892140

27 September 2011 Study of air-driving fluid jet polishing

Zong-Ru Yu, Ching-Hsiang Kuo, Chun-Cheng Chen, Wei-Yao Hsu, Din Ping Tsai

Proceedings Volume 8126, Optical Manufacturing and Testing IX; 812611 (2011) https://doi.org/10.1117/12.892140
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

In this study, we proposed an air-driving fluid jet polishing (FJP) system which draws slurry utilizing an air/water mixer. The air-driving FJP system is mainly comprised by an air/water mixer, slurry tank with stirrer, compressed air, pressure and flow rate regulators, and a nozzle. The high speed air flow in the air/water mixer draws out the slurry from the slurry tank, and the slurry is guided to mix with air flow inside the nozzle cavity. Then, the combined fluid slurry is emitted from the nozzle. The air-driving FJP system was preliminarily tested on N-BK7 and ZERODUR® plates with different air pressure and processing time. The test results show that the air-driving system could get a Gaussian-like removal shape with 3 kg/cm² compressed air source and the depth of removal is about 100 nm within 5 seconds processing time. The compressed air improves the kinetic energy of each abrasive, and makes it more efficient in material removal. Furthermore, the Gaussian-like removal shape is more convenient for tool path planning and surface waviness control of corrective polishing.

Citation Download Citation

Zong-Ru Yu, Ching-Hsiang Kuo, Chun-Cheng Chen, Wei-Yao Hsu, and Din Ping Tsai "Study of air-driving fluid jet polishing", Proc. SPIE 8126, Optical Manufacturing and Testing IX, 812611 (27 September 2011); https://doi.org/10.1117/12.892140

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