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7 September 2011 Linear systems formulation of image analysis in the presence of both aberrations and surface scatter
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Abstract
Image analysis in the presence of surface scatter due to residual optical fabrication errors is often perceived to be complicated, non-intuitive and computationally intensive. The linear systems formulation of surface scatter phenomena has resulted in the development of an angle spread function that is completely analogous to the point spread function in modern image formation theory; i.e., surface scatter can be treated very similar to conventional wavefront aberrations. For multi-element imaging systems degraded by both surface scatter and aberrations, the composite point spread function is obtained in explicit form in terms of convolutions of the geometrical point spread function and the angle spread functions of the individual surfaces of the imaging system. The approximations and assumptions in this formulation are discussed in detail, and the result is compared to the irradiance distribution obtained using commercial software for the case of a two-mirror EUV telescope. The two results are virtually identical.
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Narak Choi and James E. Harvey "Linear systems formulation of image analysis in the presence of both aberrations and surface scatter", Proc. SPIE 8128, Current Developments in Lens Design and Optical Engineering XII; and Advances in Thin Film Coatings VII, 81280B (7 September 2011); https://doi.org/10.1117/12.910930
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