Paper
1 January 1987 Fabrication And Performance Tolerances Of A Thin-Film Optical Waveguide Lens
D. W. Hewak, J. W.Y. Lit
Author Affiliations +
Proceedings Volume 0813, Optics and the Information Age; (1987) https://doi.org/10.1117/12.967394
Event: 14th Congress of the International Commission for Optics, 1987, Quebec, Canada
Abstract
The optical waveguide lens is an important and basic component in many integrated optical devices, performing such functions as focussing and collimating, Fourier transformation and optical signal processing. For many applications of the optical waveguide lens, diffraction-limited performance is required. Such a stringent focussing criterion necessitates careful control of the design parameters and fabrication procedure, as well as the in situ variables which may affect the lens performance. The design and performance of geodesic lenses and grating lenses have been treated in the past. However, for the mode-index lens, among which the Luneburg lens' shown in Fig. 1, is perhaps the most common, no complete examination of the fabrication tolerances has been made.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. W. Hewak and J. W.Y. Lit "Fabrication And Performance Tolerances Of A Thin-Film Optical Waveguide Lens", Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); https://doi.org/10.1117/12.967394
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KEYWORDS
Waveguides

Tolerancing

Error analysis

Dispersion

Thin films

Overlay metrology

Optical design

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