14 September 2011 Method for the evaluation 3D noncontact inspection systems
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Three dimensional, optical measurement systems are becoming more widely used in applications ranging from aerospace to automotive. These systems offer the potential for high speed, good accuracy, and more complete information than older contact based technology. However, the primary standards employed by many to evaluate these systems were specifically designed around touch probe based coordinate measurement machines (CMMs). These standards were designed to work with the limitations of touch probes, and in many cases cannot measure the types of features and errors associated with non-contact systems. This paper will discuss the deficiencies of employing contact based characterization tests to non-contact systems, and suggest a new set of tests specifically to cover the many aspects pertinent to non-contact, optical 3D measurement systems. Some of the performance aspects addressed in this characterization method include: sensitivity to surface reflectivity and roughness, the effect of angle of incidence of measurements, means to characterize volumetric variations that may fit complex functions, and considerations of both spatial and depth resolutions. Specific application areas will be discussed as well as the use of artifacts to provide practical functional data that can predict system performance on real world parts.
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Kevin Harding, Kevin Harding, } "Method for the evaluation 3D noncontact inspection systems", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330F (14 September 2011); doi: 10.1117/12.892596; https://doi.org/10.1117/12.892596

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