Optical metrology techniques have been widely used in geometric dimension and shape measurements due to many
features such as non-contact measurement, fast measurement speed, digital data format for computerized analysis
and visualization, superior resolution, and high accuracy, etc. Among these techniques, phase-shifting based surface
profilers have drawn more and more attention due to its full-field measurement and maturing wrapping/unwrapping
analysis characteristics. This paper analyzes the error sources in phase-shifting surface profilers, including phaseshifting
generation, non-linearity compensation, phase-shifting algorithms, surface contour extraction, modeling,
and calibration, etc. Some methods to improve the measurement accuracy through coordinate error compensation
are also proposed including transfer functions and look-up table (LUT) methods.