14 September 2011 Modeling, error analysis, and compensation in phase-shifting surface profilers
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Abstract
Optical metrology techniques have been widely used in geometric dimension and shape measurements due to many features such as non-contact measurement, fast measurement speed, digital data format for computerized analysis and visualization, superior resolution, and high accuracy, etc. Among these techniques, phase-shifting based surface profilers have drawn more and more attention due to its full-field measurement and maturing wrapping/unwrapping analysis characteristics. This paper analyzes the error sources in phase-shifting surface profilers, including phaseshifting generation, non-linearity compensation, phase-shifting algorithms, surface contour extraction, modeling, and calibration, etc. Some methods to improve the measurement accuracy through coordinate error compensation are also proposed including transfer functions and look-up table (LUT) methods.
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Qingying Jim Hu, Qingying Jim Hu, } "Modeling, error analysis, and compensation in phase-shifting surface profilers", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330L (14 September 2011); doi: 10.1117/12.894594; https://doi.org/10.1117/12.894594
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