CONFERENCE PROCEEDINGS
Advanced Search >
Home > Proceedings > Volume 8133 > Article
Translator Disclaimer
14 September 2011 Single shot phase shifting interferometry for measurement of transparent samples
David-Ignacio Serrano-García; Noel-Ivan Toto-Arellano; Amalia Martínez-García; Gustavo Rodríguez-Zurita; Areli Montes Perez
Author Affiliations +
Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330X (2011) https://doi.org/10.1117/12.894108
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States
Abstract
Due to non-destructive optical techniques allows surface measurement with high accuracy, a Common Path interferometer based on a Michelson configuration was implemented to analyze phase objects by using polarization simultaneous phase-shifting interferometry. Each beam of the interferometer has a birefringent wave plate attached in order to achieve nearly circular polarization of opposite rotations one respect to the other. The system is coupled to a 4-f arrangement with Bi-Ronchi gratings collocated in the Fourier plane. The interference of the fields associated with replicated beams, centered on each diffraction orders, is achieved varying the beams spacing with respect to the grating period. The optical configuration allows obtaining n-interferograms simultaneously. The phase reconstruction is performing by a three steps phase shifting algorithm. Experimental results are present for a phase object.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
David-Ignacio Serrano-García, Noel-Ivan Toto-Arellano, Amalia Martínez-García, Gustavo Rodríguez-Zurita, and Areli Montes Perez "Single shot phase shifting interferometry for measurement of transparent samples", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330X (14 September 2011); https://doi.org/10.1117/12.894108
PROCEEDINGS
 6 PAGES
DOWNLOAD PDF SAVE TO MY LIBRARY
SHARE
GET CITATION
< Previous Article
|
Next Article >
Advertisement
Advertisement
KEYWORDS
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top