The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Y. P. Pershyn; E. M. Gullikson; I. A. Artyukov; V. V. Kondratenko; V. A. Sevryukova; D. L. Voronov; E. N. Zubarev; A. V. Vinogradov

doi:10.1117/12.892324

28 September 2011 The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Y. P. Pershyn, E. M. Gullikson, I. A. Artyukov, V. V. Kondratenko, V. A. Sevryukova, D. L. Voronov, E. N. Zubarev, A. V. Vinogradov

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Proceedings Volume 8139, Advances in X-Ray/EUV Optics and Components VI; 81390N (2011) https://doi.org/10.1117/12.892324
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Impact of Ar gas pressure (1-4 mTorr) on the growth of amorphous interlayers in Mo/Si multilayers deposited by magnetron sputtering was investigated by small-angle x-ray scattering (λ=0.154 nm) and methods of cross-sectional transmission electron microscopy. Some reduction of thickness of the amorphous inter-layers with Ar pressure increase was found, while composition of the layers was enriched with molybdenum. The interface modification resulted in raise of EUV reflectance of the Mo/Si multilayers.

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Y. P. Pershyn, E. M. Gullikson, I. A. Artyukov, V. V. Kondratenko, V. A. Sevryukova, D. L. Voronov, E. N. Zubarev, and A. V. Vinogradov "The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 81390N (28 September 2011); https://doi.org/10.1117/12.892324

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