Automated suppression of errors in LTP-II slope measurements with x-ray optics

Zulfiqar Ali; Nikolay A. Artemiev; Curtis L. Cummings; Edward E. Domning; Nicholas Kelez; Wayne R. McKinney; Daniel J. Merthe; Gregory Y. Morrison; Brian V. Smith; Valeriy V. Yashchuk

doi:10.1117/12.894061

23 September 2011 Automated suppression of errors in LTP-II slope measurements with x-ray optics

Zulfiqar Ali, Nikolay A. Artemiev, Curtis L. Cummings, Edward E. Domning, Nicholas Kelez, Wayne R. McKinney, Daniel J. Merthe, Gregory Y. Morrison, Brian V. Smith, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 8141, Advances in Computational Methods for X-Ray Optics II; 81410O (2011) https://doi.org/10.1117/12.894061
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Systematic error and instrumental drift are the major limiting factors of sub-microradian slope metrology with state-of-the-art x-ray optics. Significant suppression of the errors can be achieved by using an optimal measurement strategy suggested in [Rev. Sci. Instrum. 80, 115101 (2009)]. Here, we report on development of an automated, kinematic, rotational system that provides fully controlled flipping, tilting, and shifting of a surface under test. The system is to be integrated into the Advanced Light Source long trace profiler, LTP-II, allowing for complete realization of the advantages of the optimal measurement strategy method. We describe in detail the system's specification, design operational control and data acquisition. The performance of the system is demonstrated via the results of high precision measurements with a number of super-polished mirrors.

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Zulfiqar Ali, Nikolay A. Artemiev, Curtis L. Cummings, Edward E. Domning, Nicholas Kelez, Wayne R. McKinney, Daniel J. Merthe, Gregory Y. Morrison, Brian V. Smith, and Valeriy V. Yashchuk "Automated suppression of errors in LTP-II slope measurements with x-ray optics", Proc. SPIE 8141, Advances in Computational Methods for X-Ray Optics II, 81410O (23 September 2011); https://doi.org/10.1117/12.894061

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