Numerical Analysis Of Multistep Dielectric Gratings

Jiro Yamakita; Katsu Rokushima; Shizuo Mori

doi:10.1117/12.941747

9 February 1987 Numerical Analysis Of Multistep Dielectric Gratings

Jiro Yamakita, Katsu Rokushima, Shizuo Mori

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941747
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

An exact numerical method of analyzing deep dielectric gratings with multistep lamellar profiles is presented. This method is able to predict the diffraction efficiencies of dielectric gratings for both TE and TM polarizations. In this paper we use a modal expansion method in terms of modal functions which are rigorous solutions of the Maxwell's equations and fulfill the boundary conditions on the upright enclosing sides of the rectangular profiles. The coefficients of the modal expansion are determined such that the mean-square boundary residual becomes minimum, and the sequence of approximate solutions converges rapidly and monotonically with respect to the truncation size of the expansion order with help of the smoothing procedure of the modal fields. To show the validity of this algorithm in the sinusoidal surface-relief gratings, the results are compared with those obtained by other methods.

Citation Download Citation

Jiro Yamakita, Katsu Rokushima, and Shizuo Mori "Numerical Analysis Of Multistep Dielectric Gratings", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941747

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